Nanofabrication using home-made RF plasma coupled chemical vapour deposition system
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: International Journal of Modern Physics: Conference Series
سال: 2014
ISSN: 2010-1945,2010-1945
DOI: 10.1142/s2010194514603421